Open AccessParallel nanometer scale fabrication
Author(s) -
Kenneth T. Douglas
Publication year - 1990
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/6950899
Subject(s) - fabrication , overlayer , nanostructure , materials science , scanning tunneling microscope , nanotechnology , nanometre , monolayer , transmission electron microscopy , lithography , ion milling machine , crystallography , layer (electronics) , optoelectronics , chemistry , composite material , medicine , alternative medicine , pathology
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