Open AccessDiagnostics of glow discharges used to produce hydrogenated amorphous silicon films
Author(s) -
Alan Gallagher,
D. A. Doughty,
James R. Doyle
Publication year - 1990
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6910198
Subject(s) - amorphous silicon , deposition (geology) , glow discharge , silicon , materials science , amorphous solid , chemical engineering , nanotechnology , optoelectronics , chemistry , crystalline silicon , plasma , physics , crystallography , engineering , geology , paleontology , quantum mechanics , sediment
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