Open AccessArgon ion sputtering of niobium and niobium alloys
Author(s) -
P.F. Tortorelli
Publication year - 1978
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6798575
Subject(s) - sputtering , niobium , materials science , argon , annealing (glass) , amorphous solid , analytical chemistry (journal) , auger electron spectroscopy , electron microprobe , metallurgy , crystallography , atomic physics , chemistry , thin film , nanotechnology , physics , chromatography , nuclear physics
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