Open AccessChemical vapor deposition in the silicon-carbon and boron-carbon-nitrogen systems
Author(s) -
Theodore M. Besmann
Publication year - 1988
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6567811
Subject(s) - chemical vapor deposition , carbon fibers , boron , silicon , nitrogen , deposition (geology) , materials science , coating , analytical chemistry (journal) , phase (matter) , chemical engineering , chemistry , composite number , nanotechnology , composite material , organic chemistry , metallurgy , paleontology , sediment , engineering , biology
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