Open AccessThe glow discharge as an atomization and ionization device: Progress report, 1 September 1987--31 October 1988
Author(s) -
W. W. Harrison
Publication year - 1988
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/6274101
Subject(s) - glow discharge , vaporization , ionization , dissociation (chemistry) , atomic physics , sputtering , collision , materials science , physics , plasma , chemistry , nuclear physics , ion , computer science , nanotechnology , thermodynamics , thin film , quantum mechanics , computer security
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