Open AccessLSA silicon material task closed-cycle process development. Quarterly report No. 1, August--September 1978
Author(s) -
R. A. Roques,
G.F. Wakefield,
Jr. Blocher,
M. F. Browning
Publication year - 1978
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/6084816
Subject(s) - trichlorosilane , silicon tetrachloride , process engineering , engineering , process (computing) , manufacturing engineering , silicon , reliability engineering , computer science , materials science , metallurgy , operating system