Open AccessFabrication of miniaturized electrostatic deflectors using LIGA
Author(s) -
K.H. Jackson,
Chantal KhanMalek,
L. P. Muray
Publication year - 1997
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/604281
Subject(s) - liga , fabrication , materials science , lithography , optics , electron beam lithography , resist , miniaturization , etching (microfabrication) , semiconductor device fabrication , optoelectronics , stencil lithography , nanotechnology , wafer , physics , pathology , layer (electronics) , medicine , alternative medicine
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