Open AccessPhase-shifting point-diffraction interferometry at EUV wavelengths
Author(s) -
Kenneth A. Goldberg,
Edita Tejnil,
Sang Lee
Publication year - 1997
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/603707
Subject(s) - optics , extreme ultraviolet lithography , wavefront , diffraction , physics , pinhole (optics) , grating , interferometry , materials science