Open AccessIon-implanted Si-nanostructures buried in a SiO{sub 2} substrate studied with soft-x-ray spectroscopy
Author(s) -
R.M. Williams,
JanErik Rubensson,
Stefan Eisebitt
Publication year - 1997
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/603520
Subject(s) - silicon , nanostructure , materials science , luminescence , substrate (aquarium) , ion , porous silicon , nanotechnology , electronic structure , spectroscopy , atom probe , x ray photoelectron spectroscopy , optoelectronics , atom (system on chip) , chemical physics , chemistry , physics , computational chemistry , nuclear magnetic resonance , organic chemistry , quantum mechanics , oceanography , transmission electron microscopy , computer science , embedded system , geology
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