Open AccessExploring synchrotron radiation capabilities: The ALS-Intel CRADA
Author(s) -
F. Gozzo,
A. Cossy-Favre,
B. Trippleet,
Hitoshi Fujimoto,
Howard Padmore
Publication year - 1997
Language(s) - English
Resource type - Reports
DOI - 10.2172/603510
Subject(s) - beamline , synchrotron radiation , wafer , semiconductor industry , semiconductor , semiconductor device fabrication , synchrotron , engineering physics , materials science , computer science , nanotechnology , optoelectronics , engineering , optics , physics , manufacturing engineering , beam (structure)