Open AccessDevelopment of a polysilicon process based on chemical vapor deposition. Sixth quarterly progress report, 1 January-31 March 1981 (Phase 1)
Author(s) -
J. R. McCormick,
A. Arvidson,
D. Sawyer,
F. Plahutnik
Publication year - 1981
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/5746839
Subject(s) - piping , nuclear engineering , shield , shields , process engineering , dichlorosilane , heat transfer , engineering , environmental science , mechanical engineering , materials science , electrical engineering , silicon , electromagnetic shielding , metallurgy , petrology , physics , thermodynamics , geology
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