Open AccessProcess feasibility study in support of silicon material, Task 1. Quarterly technical progress report (XVI), June-August, 1979
Author(s) -
K. Y. Li,
K. C. Hansen,
C. L. Yaws
Publication year - 1979
Language(s) - English
Resource type - Reports
DOI - 10.2172/5626241
Subject(s) - silicon , process engineering , tonne , dichlorosilane , vaporization , capital cost , waste management , environmental science , engineering , engineering physics , materials science , chemistry , electrical engineering , metallurgy , organic chemistry