Open AccessStudy of high Tc superconducting thin films grown by MOCVD (metalorganic chemical vapor deposition)
Author(s) -
A. Erbil
Publication year - 1989
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/5485434
Subject(s) - metalorganic vapour phase epitaxy , superlattice , microelectronics , chemical vapor deposition , superconductivity , materials science , fabrication , nanotechnology , semiconductor , engineering physics , deposition (geology) , thin film , optoelectronics , condensed matter physics , epitaxy , physics , layer (electronics) , paleontology , sediment , medicine , alternative medicine , pathology , biology
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