Open AccessDependence of silicon carbide coating properties on deposition parameters: preliminary report
Author(s) -
Robert J Lauf,
D. N. Braski
Publication year - 1980
Language(s) - English
Resource type - Reports
DOI - 10.2172/5461306
Subject(s) - silicon carbide , pyrolytic carbon , materials science , layer (electronics) , deposition (geology) , coating , silicon , carbide , thermal decomposition , chemical engineering , hydrogen , decomposition , pyrolysis , composite material , metallurgy , chemistry , organic chemistry , paleontology , sediment , engineering , biology
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