Open AccessSynthesis of silane and silicon in a non-equilibrium plasma jet. Fourth quarterly report, March 21--June 20, 1977
Author(s) -
H. F. Calcote,
W. Felder
Publication year - 1977
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/5453852
Subject(s) - chemistry , chlorosilane , analytical chemistry (journal) , nozzle , silane , hydrogen , silicon , yield (engineering) , materials science , organic chemistry , thermodynamics , physics , metallurgy
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