Open AccessMolybdeum etching rate studies
Author(s) -
Richard A. Spears
Publication year - 1980
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/5281694
Subject(s) - molybdenum , etching (microfabrication) , materials science , arc (geometry) , composite material , tube (container) , metallurgy , acid etching , geometry , mathematics , layer (electronics)
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