Open AccessAnalysis of effects of impurities intentionally incorporated into silicon. Third quarterly report, August 1--October 28, 1977
Author(s) -
F. M. Uno
Publication year - 1977
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/5267005
Subject(s) - ingot , silicon , impurity , wafer , contamination , materials science , fabrication , analytical chemistry (journal) , yield (engineering) , electrical engineering , optoelectronics , chemistry , engineering , metallurgy , environmental chemistry , medicine , ecology , alternative medicine , organic chemistry , alloy , pathology , biology
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