Open AccessLOW-ENERGY SPUTTERING STUDIES. Annual Report, July 15, 1960 to July 14, 1961
Author(s) -
Daniel McKeown,
Amado Y. Cabezas,
E. T. MacKenzie
Publication year - 1961
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/4807126
Subject(s) - sputtering , atomic physics , ion , aluminium , electron , physics , materials science , analytical chemistry (journal) , chemistry , nuclear physics , thin film , nanotechnology , quantum mechanics , chromatography , metallurgy
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