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Nanofabrication with the Scanning Tunneling Microscope
Author(s) -
G. M. Shedd,
P. E. Russell
Publication year - 1988
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/476650
Subject(s) - scanning tunneling microscope , nanolithography , nanotechnology , focused ion beam , nanometre , materials science , nanoscopic scale , ultra high vacuum , resolution (logic) , microscope , interface (matter) , optoelectronics , fabrication , computer science , chemistry , optics , ion , physics , capillary action , medicine , alternative medicine , organic chemistry , pathology , capillary number , artificial intelligence , composite material

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