Open AccessDevelopment of a focused ion beam micromachining system
Author(s) -
J. G. Pellerin,
D. P. Griffis,
P. E. Russell
Publication year - 1988
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/476649
Subject(s) - surface micromachining , nanolithography , focused ion beam , materials science , fabrication , nanotechnology , ion beam , ion , beam (structure) , optics , chemistry , physics , medicine , alternative medicine , organic chemistry , pathology
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