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Atomic structure of machined semiconducting chips: An x-ray absorption spectroscopy study
Author(s) -
M. A. Paesler,
D. E. Sayers
Publication year - 1988
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/476642
Subject(s) - x ray absorption spectroscopy , machining , diamond , atomic absorption spectroscopy , materials science , spectroscopy , absorption spectroscopy , germanium , crystal structure , absorption (acoustics) , crystallography , optics , chemistry , silicon , optoelectronics , metallurgy , physics , composite material , quantum mechanics

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