Open AccessPREPARATION OF SELF-SUPPORTED GeO$sub 2$--16 PERCENT P$sub 2$O$sub 5$--8 PERCENT V$sub 2$O$sub 5$ FILMS BY SPUTTERING.
Author(s) -
D. N. Braski,
B.F. Early
Publication year - 1972
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/4655446
Subject(s) - sputtering , analytical chemistry (journal) , wafer , thin film , materials science , crystallography , chemistry , nanotechnology , chromatography
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