Open AccessAPPLICATION OF ELECTRON MICROSCOPY IN DIMENSIONAL METROLOGY
Author(s) -
W. B. Estill,
J C Moody
Publication year - 1965
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/4575353
Subject(s) - metrology , simple (philosophy) , computer science , electron microscope , nanotechnology , computational science , materials science , optics , physics , philosophy , epistemology
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