Open AccessFilm thickness resistance monitor for dynamic control of vacuum deposited films
Author(s) -
J. Provo
Publication year - 1974
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/4352192
Subject(s) - materials science , deposition (geology) , substrate (aquarium) , scandium , electrical resistivity and conductivity , composite material , vacuum deposition , thin film , electrical resistance and conductance , optoelectronics , metallurgy , electrical engineering , nanotechnology , biology , paleontology , oceanography , engineering , sediment , geology
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