
Parametric study of dc diode sputtered tungsten films
Author(s) -
F.G. Yost,
D. D. Sheldon,
E.E. Komarek
Publication year - 1974
Language(s) - English
Resource type - Reports
DOI - 10.2172/4264771
Subject(s) - tungsten , parametric statistics , diode , spike (software development) , signal (programming language) , pulse (music) , materials science , nitrogen , atomic physics , plasma , physics , optics , optoelectronics , mathematics , statistics , engineering , computer science , nuclear physics , software engineering , quantum mechanics , metallurgy , programming language , detector