Open AccessControl of fluorine in CVD tungsten
Author(s) -
Jia Min Chin,
J.B. Horsley,
C.W. Messick
Publication year - 1969
Language(s) - English
Resource type - Reports
DOI - 10.2172/4212407
Subject(s) - tungsten , fluorine , environmental science , chemistry , environmental chemistry , materials science , metallurgy
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