Open AccessSafety analysis of the 2.5 MV accelerator in the Solid State Division's Positive Heavy Ion Scattering Implantation, Channeling and Sputtering (PHISICS) facility
Author(s) -
O.E. Schow
Publication year - 1975
Language(s) - English
Resource type - Reports
DOI - 10.2172/4181510
Subject(s) - sputtering , division (mathematics) , scattering , heavy ion , solid state , ion , nuclear physics , materials science , physics , atomic physics , nuclear engineering , engineering , optics , engineering physics , thin film , nanotechnology , mathematics , arithmetic , quantum mechanics