Open AccessExploring Al(X)Ga(1-X)N Nanostructures Fabricated via Top-Down Chemical Wet Etching.
Author(s) -
Barbara Kazanowska,
Keshab Sapkota,
Brendan Gunning,
K. S. Jones,
George Wang
Publication year - 2021
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.2172/1870578
Subject(s) - etching (microfabrication) , nanostructure , materials science , isotropic etching , nanotechnology , dry etching , nanolithography , optoelectronics , chemical engineering , fabrication , layer (electronics) , engineering , medicine , alternative medicine , pathology
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