Open AccessOn-Wafer Microfabricated Test Structures for Characterizing RF Breakdown in Narrow Gaps.
Author(s) -
Alexander Ruyack,
Matthew B. Jordan,
Christopher Moore,
Gwendolyn Hummel,
Sergio Ramos Herrera,
Mark Ballance,
A. Bingham,
Adrian Schiess,
Christopher Gibson,
Christopher Nordquist
Publication year - 2021
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.2172/1869544
Subject(s) - wafer , materials science , wafer scale integration , optoelectronics , radio frequency , electrical engineering , engineering
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