Open AccessShoulder fillet effects in strength distributions of polysilicon MEMS.
Author(s) -
Frank W. DelRio,
Brad Boyce,
Jake T. Benzing,
Lawrence M. Friedman,
Robert L. Cook
Publication year - 2021
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.2172/1868006
Subject(s) - fillet (mechanics) , microelectromechanical systems , materials science , fabrication , monte carlo method , composite material , structural engineering , engineering , nanotechnology , mathematics , medicine , statistics , alternative medicine , pathology
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