Open AccessAtomic precision advanced manufacturing (APAM) of ultra-doped nanostructures for advanced CMOS devices and interconnects.
Author(s) -
David Scrymgeour,
Esther Frederick,
Connor Halsey,
DeAnna Campbell,
Evan M. Anderson,
Scott Schmucker,
Jeffrey Ivie,
Xujiao Gao,
Tzu-Ming Lu,
Lisa Tracy,
Shashank Misra
Publication year - 2021
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.2172/1863854
Subject(s) - doping , cmos , optoelectronics , materials science , nanostructure , electronic engineering , computer science , nanotechnology , engineering
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