Open AccessA chemical model for atomic-precision single-donor incorporation of phosphorus atoms in Si(100)-2x1.
Author(s) -
Quinn Campbell,
Jeffrey Ivie,
Justin Koepke,
Mitchell Brickson,
Peter C. Schultz,
Richard P. Muller,
Ezra Bussmann,
Andrew Baczewski,
Andrew Mounce,
Shashank Misra
Publication year - 2021
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.2172/1854314
Subject(s) - phosphorus , silicon , materials science , chemistry , metallurgy
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