Open AccessMegahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer With Fiber Optical Interconnects.
Author(s) -
Daniel Domı́nguez,
Lisa Hackett,
Michael E. Miller,
Jennifer Restrepo,
Katya M. Casper,
Matt Eichenfield
Publication year - 2021
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.2172/1847605
Subject(s) - surface micromachining , accelerometer , bandwidth (computing) , acceleration , optical fiber , bulk micromachining , materials science , integrated optics , optoelectronics , proof mass , dynamic range , microelectromechanical systems , computer science , physics , optics , fabrication , telecommunications , medicine , alternative medicine , pathology , classical mechanics , operating system
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom