A multiscale model of the reaction pathway for p-type doping using diborane on Si(100)-2x1.
Author(s) -
Quinn Campbell,
Jeffrey Ivie,
Ezra Bussmann,
Scott Schmucker,
Andrew Baczewski,
Shashank Misra
Publication year - 2020
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Conference proceedings
DOI - 10.2172/1829238
Subject(s) - diborane , boron , dimer , acceptor , dissociation (chemistry) , doping , hydrogen , materials science , density functional theory , silicon , halogen , activation energy , chemistry , computational chemistry , photochemistry , condensed matter physics , optoelectronics , physics , organic chemistry , alkyl
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