Open AccessAcoustic Wafer Defect Detection System
Author(s) -
Cristian Pantea
Publication year - 2021
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/1813835
Subject(s) - wafer , signal (programming language) , acoustics , ultrasonic sensor , path (computing) , controller (irrigation) , transducer , interval (graph theory) , welding , materials science , computer science , physics , engineering , electrical engineering , mathematics , mechanical engineering , biology , programming language , agronomy , combinatorics
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