Open AccessCharacterization of Extreme Ultraviolet Coatings
Author(s) -
Dane A. Boysen
Publication year - 2020
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/1615928
Subject(s) - extreme ultraviolet , extreme ultraviolet lithography , characterization (materials science) , ultraviolet , optics , materials science , ultraviolet radiation , optical coating , nanotechnology , optoelectronics , physics , chemistry , coating , laser , radiochemistry
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