Open AccessHolographic Lithography for Industrial Nanomanufacturing
Author(s) -
Beth Zotter
Publication year - 2020
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/1614764
Subject(s) - nanomanufacturing , lithography , holography , materials science , stencil lithography , nanoscopic scale , x ray lithography , nanotechnology , scanning electron microscope , extreme ultraviolet lithography , optics , optoelectronics , resist , physics , composite material , layer (electronics)
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