Open AccessNon-Equilibrium Processes, Stability, Design and Control of Pulsed Plasmas for Materials Processing
Author(s) -
Mark J. Kushner
Publication year - 2020
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/1596482
Subject(s) - microelectronics , plasma processing , plasma , materials science , wafer , fabrication , nanotechnology , surface modification , materials processing , nanostructure , process engineering , chemical engineering , physics , engineering , medicine , alternative medicine , pathology , quantum mechanics
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