Open AccessLDRD Final Report: Film Growth Dynamics During Pulsed Sputter Deposition
Author(s) -
Yinmin Wang
Publication year - 2019
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/1573168
Subject(s) - sputter deposition , sputtering , deposition (geology) , materials science , dynamics (music) , nanotechnology , optoelectronics , chemical physics , thin film , chemistry , physics , geology , paleontology , sediment , acoustics
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