Open AccessLaB6 nanostructures - wet vs dry etch [Slides]
Author(s) -
Taisuke Ohta
Publication year - 2019
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/1491599
Subject(s) - nanopillar , materials science , lamella (surface anatomy) , layer (electronics) , nanotechnology , nanostructure , composite material
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