Open AccessAdvanced Gate Dielectric Materials for Next-Generation Integrated Circuits
Author(s) -
Piero Pianetta
Publication year - 2018
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/1483866
Subject(s) - overlayer , annealing (glass) , acetylene , x ray photoelectron spectroscopy , materials science , desorption , molecule , spectral line , dielectric , silicon , optoelectronics , analytical chemistry (journal) , chemistry , chemical engineering , adsorption , organic chemistry , composite material , physics , astronomy , engineering
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