Quantum Nanofabrication: Mechanisms and Fundamental Limits.
Author(s) -
George T. Wang,
Michael E. Coltrin,
Ping Lü,
Philip Miller,
Benjamin Leung,
Xiaoyin Xiao,
Keshab Sapkota,
François Léonard,
Gabriela Bran Anleu,
Daniel Koleske,
Jeffrey Y. Tsao,
Jeffrey S. Nelson,
Ganesh Balakrishnan,
Sadhvikas Addamane
Publication year - 2018
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/1474257
Subject(s) - scope (computer science) , nanolithography , quantum , nanotechnology , computer science , etching (microfabrication) , nanostructure , quantum dot , process (computing) , fabrication , materials science , physics , quantum mechanics , medicine , alternative medicine , pathology , layer (electronics) , programming language , operating system
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