Open AccessSoft X-Ray Reflection Optics for X-Ray Projection Lithography Final Report CRADA No. TC-0191/0192-92
Author(s) -
D. R. Kania,
J. F. Salvador,
David A. Markle,
Richard M. Foster
Publication year - 2018
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/1432981
Subject(s) - resist , optics , lithography , x ray lithography , reflection (computer programming) , physics , projection (relational algebra) , absorption (acoustics) , materials science , computer science , nanotechnology , layer (electronics) , algorithm , programming language
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