Open AccessSilicon Carbide Film Growth Final Report CRADA No. TC-1060-94
Author(s) -
J. Amano,
Amir Hamza
Publication year - 2018
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/1424675
Subject(s) - materials science , silicon carbide , wafer , silicon , optoelectronics , thin film , diode , substrate (aquarium) , nanotechnology , metallurgy , oceanography , geology
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