Open AccessTribological Studies of Microelectromechanical Systems
Author(s) -
Shan J. Timpe,
K. Komvopoulos,
Bonnie R. Antoun,
Michael Thomas Dugger
Publication year - 2008
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/1324748
Subject(s) - microelectromechanical systems , tribology , reliability (semiconductor) , stiction , materials science , surface micromachining , interface (matter) , mechanical engineering , adhesion , contact mechanics , contact force , dynamic testing , nanotechnology , computer science , engineering , structural engineering , composite material , contact angle , finite element method , fabrication , medicine , power (physics) , physics , alternative medicine , pathology , quantum mechanics , sessile drop technique