Open AccessLiterature Review of Spin On Glass
Author(s) -
Reuben James Peterson
Publication year - 2016
Language(s) - English
Resource type - Reports
DOI - 10.2172/1240802
Subject(s) - chemical mechanical planarization , dielectric , viscosity , materials science , variety (cybernetics) , spin glass , silicon dioxide , engineering physics , nanotechnology , process engineering , optoelectronics , computer science , polishing , composite material , condensed matter physics , physics , engineering , artificial intelligence