Open AccessLiterature Review of Spin On Glass
Author(s) -
Reuben James Peterson
Publication year - 2016
Language(s) - English
Resource type - Reports
DOI - 10.2172/1240802
Subject(s) - chemical mechanical planarization , dielectric , viscosity , variety (cybernetics) , spin glass , materials science , silicon dioxide , nanotechnology , engineering physics , process engineering , computer science , polishing , composite material , optoelectronics , condensed matter physics , physics , engineering , artificial intelligence
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