
First Principle Simulation of Diffraction based Metrology Techniques
Author(s) -
S. Sohail,
S. Sohail H. Naqvi,
J. R. McNeil,
Richard H. Krukar,
Paulo R.G. Franco,
Robert W. Leland,
Kenneth P. Bishop
Publication year - 2015
Language(s) - English
Resource type - Reports
DOI - 10.2172/1227984
Subject(s) - turbine , nozzle , nuclear engineering , computer science , environmental science , engineering , mechanical engineering