Open AccessDevelopment of a MEMS dual-axis differential capacitance floating element shear stress sensor
Author(s) -
Casey Barnard,
Benjamin A. Griffin
Publication year - 2015
Language(s) - English
Resource type - Reports
DOI - 10.2172/1222985
Subject(s) - capacitive sensing , materials science , shear stress , microelectromechanical systems , sensitivity (control systems) , wind tunnel , capacitance , demodulation , ranging , acoustics , electrical engineering , engineering , electronic engineering , mechanics , optoelectronics , physics , composite material , telecommunications , electrode , quantum mechanics , channel (broadcasting)