Open AccessSynthesis of Silane and Silicon in a Non-Equilibrium Plasma Jet. Seventh Quarterly Report, February 1 -- April 30, 1978
Author(s) -
H. F. Calcote,
E. J. Lewis,
R. H. Mullen
Publication year - 1978
Language(s) - English
Resource type - Reports
DOI - 10.2172/12205475
Subject(s) - silicon , substrate (aquarium) , jet (fluid) , amorphous solid , silane , nozzle , analytical chemistry (journal) , amorphous silicon , materials science , hydrogen , chemistry , crystalline silicon , metallurgy , composite material , crystallography , organic chemistry , thermodynamics , physics , oceanography , geology