Open AccessChemical Vapor Deposition Growth. Final Report, December 29, 1975 -- August 31, 1977
Author(s) -
R. P. Ruth,
H. M. Manasevit,
Andrew G. Campbell,
R. E. Johnson,
J. L. Kenty,
L. A. Moudy,
Graham Shaw,
W. I. Simpson,
J. J. Yang
Publication year - 1978
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/12205306
Subject(s) - fabrication , chemical vapor deposition , dichlorosilane , solar cell , materials science , silane , substrate (aquarium) , deposition (geology) , characterization (materials science) , silicon , process development , nanotechnology , chemical engineering , process engineering , optoelectronics , composite material , engineering , sediment , geology , medicine , paleontology , oceanography , alternative medicine , pathology , biology